
Proceedings Paper
Measurement accuracy of fringe projection depending on surface normal directionFormat | Member Price | Non-Member Price |
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Paper Abstract
An accuracy analysis of fringe projection systems is performed taking into account the geometric properties of the sensor
and the surface shape of the measuring objects. Especially the deviations of the normal vector directions between the
optical axis of projection and observation contribute to differences in the achievable measuring accuracy. An accuracy
model was developed which describes the relation between the (fix) geometry of the sensor components and the
(variable) conditions of the measurement characterized by a set of parameters on the one side and the measuring
accuracy on the other side.
Paper Details
Date Published: 10 September 2009
PDF: 9 pages
Proc. SPIE 7432, Optical Inspection and Metrology for Non-Optics Industries, 743203 (10 September 2009); doi: 10.1117/12.827057
Published in SPIE Proceedings Vol. 7432:
Optical Inspection and Metrology for Non-Optics Industries
Peisen S. Huang; Toru Yoshizawa; Kevin G. Harding, Editor(s)
PDF: 9 pages
Proc. SPIE 7432, Optical Inspection and Metrology for Non-Optics Industries, 743203 (10 September 2009); doi: 10.1117/12.827057
Show Author Affiliations
Peter Kühmstedt, Fraunhofer IOFJena (Germany)
Christian Bräuer-Burchardt, Fraunhofer IOFJena (Germany)
Christian Bräuer-Burchardt, Fraunhofer IOFJena (Germany)
Gunther Notni, Fraunhofer IOFJena (Germany)
Published in SPIE Proceedings Vol. 7432:
Optical Inspection and Metrology for Non-Optics Industries
Peisen S. Huang; Toru Yoshizawa; Kevin G. Harding, Editor(s)
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