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Proceedings Paper

Measurement accuracy of fringe projection depending on surface normal direction
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Paper Abstract

An accuracy analysis of fringe projection systems is performed taking into account the geometric properties of the sensor and the surface shape of the measuring objects. Especially the deviations of the normal vector directions between the optical axis of projection and observation contribute to differences in the achievable measuring accuracy. An accuracy model was developed which describes the relation between the (fix) geometry of the sensor components and the (variable) conditions of the measurement characterized by a set of parameters on the one side and the measuring accuracy on the other side.

Paper Details

Date Published: 10 September 2009
PDF: 9 pages
Proc. SPIE 7432, Optical Inspection and Metrology for Non-Optics Industries, 743203 (10 September 2009); doi: 10.1117/12.827057
Show Author Affiliations
Peter Kühmstedt, Fraunhofer IOFJena (Germany)
Christian Bräuer-Burchardt, Fraunhofer IOFJena (Germany)
Gunther Notni, Fraunhofer IOFJena (Germany)


Published in SPIE Proceedings Vol. 7432:
Optical Inspection and Metrology for Non-Optics Industries
Peisen S. Huang; Toru Yoshizawa; Kevin G. Harding, Editor(s)

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