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Proceedings Paper

Wavelength-modulated heterodyne speckle interferometry for displacement measurement
Author(s): Ju-Yi Lee; Kun-Yi Lin; Szu-Han Huang
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Paper Abstract

A heterodyne speckle interferometry for measurement of in-plane displacement is proposed. The wavelength-modulated (WM) laser beam passing through an unequal-path-length optical configuration is used as a heterodyne light source. The scattering heterodyne speckle signal is received by letting the WM heterodyne light incidents on the in-plane moving rough surface. The object displacement would be determined by the speckle interferometry theorem with the measured phase variation of the heterodyne speckle signal. The experimental results demonstrate that the measurement range is up to 10 μm and resolution is about 10 nm.

Paper Details

Date Published: 17 June 2009
PDF: 8 pages
Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73892G (17 June 2009); doi: 10.1117/12.827047
Show Author Affiliations
Ju-Yi Lee, National Central Univ. (Taiwan)
Kun-Yi Lin, National Central Univ. (Taiwan)
Szu-Han Huang, National Central Univ. (Taiwan)

Published in SPIE Proceedings Vol. 7389:
Optical Measurement Systems for Industrial Inspection VI
Peter H. Lehmann, Editor(s)

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