
Proceedings Paper
Comparison of multilayer laser scribing of thin film solar cells with femto, pico, and nanosecond pulse durationsFormat | Member Price | Non-Member Price |
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Paper Abstract
We report experimental studies on laser scribing of thin film solar cells using various types of short pulsed lasers
(nanosecond, picosecond, and femtosecond temporal pulse widths), aiming to determine the optimum laser parameters
for the scribing of multilayer structures of amorphous silicon (a-Si) and copper indium diselenide (CIS) based solar cells.
Detailed laser scribing parameters such as repetition rate of the laser pulses, scanning speed of the sample and laser
beam, individual pulse energy, laser wavelength, and direction of laser illumination (either from film side or from
substrate side) are examined. Characteristics of each scribing conditions are evaluated in terms of morphology by atomic
force microscopy (AFM) and scanning electron microscopy (SEM), chemical species analysis by Energy Dispersive X-ray
Spectroscopy (EDS), and electrical conductance of interconnects by conductive AFM (c-AFM) and contact
resistance measurement to determine the optimal laser scribing conditions. Further issues on defects in the films such as
re-deposited debris, elevated molten rim and delamination, thermal damage to surrounding and/or underlying layers and
inter-diffusion of materials at the interface are discussed on the basis of thermal/mass diffusion, thermal stress, and
ablation-induced plasma formation, in order to demonstrate an efficient laser scribing of P1/P2/P3 of thin film solar
cells.
Paper Details
Date Published: 20 August 2009
PDF: 10 pages
Proc. SPIE 7409, Thin Film Solar Technology, 74090A (20 August 2009); doi: 10.1117/12.826458
Published in SPIE Proceedings Vol. 7409:
Thin Film Solar Technology
Alan E. Delahoy; Louay A. Eldada, Editor(s)
PDF: 10 pages
Proc. SPIE 7409, Thin Film Solar Technology, 74090A (20 August 2009); doi: 10.1117/12.826458
Show Author Affiliations
Tai-Wook Kim, Seoul National Univ. (Korea, Republic of)
Heui-Jae Pahk, SNU Precision Co., Ltd. (Korea, Republic of)
Hee K. Park, AppliFlex LLC (United States)
Heui-Jae Pahk, SNU Precision Co., Ltd. (Korea, Republic of)
Hee K. Park, AppliFlex LLC (United States)
David J. Hwang, Univ. of California, Berkeley (United States)
Costas P. Grigoropoulos, Univ. of California, Berkeley (United States)
Costas P. Grigoropoulos, Univ. of California, Berkeley (United States)
Published in SPIE Proceedings Vol. 7409:
Thin Film Solar Technology
Alan E. Delahoy; Louay A. Eldada, Editor(s)
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