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Proceedings Paper

Refractive index and thickness of coating measurement interferometer
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Paper Abstract

We proposed a method to measure the optical constants of thin film through polarizing phase shifting interferometer based on Twyman-Green interferometer structure. A broadband light source coming with a narrow band-pass filter was used to generate a low coherence light and the wavelength is tunable by changing the filter. A pixelated micro-polarizer mask on the detection camera made phase shifting array to make different phase shifts at once. Therefore, we can use one single interferogram to extract phase information, and it is effective in reducing environmental vibration. The refractive index and thickness of thin film can be derived from the obtained reflection coefficient's magnitude and phase. The measurement results were compared with the results obtained by an ellipsometer.

Paper Details

Date Published: 20 August 2009
PDF: 8 pages
Proc. SPIE 7409, Thin Film Solar Technology, 74090S (20 August 2009); doi: 10.1117/12.825815
Show Author Affiliations
Chao-Yuan Wu, National Central Univ. (Taiwan)
Kai Wu, National Central Univ. (Taiwan)
Sheng-Hui Chen, National Central Univ. (Taiwan)
Cheng-Chung Lee, National Central Univ. (Taiwan)

Published in SPIE Proceedings Vol. 7409:
Thin Film Solar Technology
Alan E. Delahoy; Louay A. Eldada, Editor(s)

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