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Proceedings Paper

Polarized optical scattering measurements of metallic nanoparticles upon a silicon wafer
Author(s): Cheng-Yang Liu; Wei-En Fu
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Paper Abstract

Bidirectional ellipsometry has been developed as a technique for distinguishing among various scattering features near surfaces. The out-of-plane polarized light-scattering by metallic nanoparticles on wafer is calculated and measured. These calculations and measurements yield angular dependence of bidirectional ellipsometric parameters for out-ofplane scattering. The experimental data show good agreement with theoretical predictions for different diameter of gold spheres. The results suggest that improvements for accuracy are possible to perform measurements of scattering features from metallic nanoparticles. The polarization of light scattered by metallic nanoparticles can be used to determine the size of nano-particulate contaminants on silicon wafers.

Paper Details

Date Published: 17 June 2009
PDF: 8 pages
Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73892C (17 June 2009); doi: 10.1117/12.825716
Show Author Affiliations
Cheng-Yang Liu, Industrial Technology Research Institute (Taiwan)
Wei-En Fu, Industrial Technology Research Institute (Taiwan)

Published in SPIE Proceedings Vol. 7389:
Optical Measurement Systems for Industrial Inspection VI
Peter H. Lehmann, Editor(s)

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