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Proceedings Paper

Environment for thin-film manufacturing process development for product engineering of micro and nano devices
Author(s): Dirk Ortloff; Kai Hahn; Jens Popp; Thilo Schmidt; Rainer Brück
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Paper Abstract

Product engineering of micro and nano technology (MNT) devices differs substantially from product engineering in more traditional industries. The general development approach is mostly bottom up, as it centers around the available fabrication techniques and is characterised by application specific fabrication flows, i.e. fabrication processes depending on the later product. In the first part of this paper we introduce a comprehensive customer-oriented product engineering methodology for MNT products that regards the customer as the driving force behind new product developments. The MNT product engineering process is analyzed with regard to application-specific procedures and interfaces. An environment for the development of MNT manufacturing processes has been identified as a technical foundation for the methodology and will be described in the second part of this paper.

Paper Details

Date Published: 20 August 2009
PDF: 10 pages
Proc. SPIE 7402, Nanoengineering: Fabrication, Properties, Optics, and Devices VI, 74020N (20 August 2009);
Show Author Affiliations
Dirk Ortloff, Process Relations GmbH (Germany)
Kai Hahn, Univ. of Siegen (Germany)
Jens Popp, Process Relations GmbH (Germany)
Thilo Schmidt, Univ. of Siegen (Germany)
Rainer Brück, Univ. of Siegen (Germany)

Published in SPIE Proceedings Vol. 7402:
Nanoengineering: Fabrication, Properties, Optics, and Devices VI
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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