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Proceedings Paper

Increased UV transmission by improving the manufacturing processes for FS
Author(s): Jessica DeGroote-Nelson; Tobias Nitzshe; Daniel E. Savage; Jonathan T. Watson; Donald K. Henry; Andrew A. Haefner; Robert A. Wiederhold
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Paper Abstract

Optical designers have been designing ultraviolet (UV) systems at wavelengths in the UV region for many years. With increasing demand for deep UV applications, special considerations that are not applicable to traditional visible optics must be taken to produce the optics. Specifically as the wavelength of incident light decreases, the importance of very smooth surfaces increases. The intent of this project is to increase the performance of UV optics in a four-phase project. The first phase consists of characterizing sub-surface damage using destructive methods to enable process control, the second phase (presented here) focuses on polishing methods, the third phase will include cleaning and possible etching protocols and the fourth phase will be improving thin film coating performance.

Paper Details

Date Published: 21 August 2009
PDF: 9 pages
Proc. SPIE 7426, Optical Manufacturing and Testing VIII, 742609 (21 August 2009); doi: 10.1117/12.825377
Show Author Affiliations
Jessica DeGroote-Nelson, Optimax Systems, Inc. (United States)
Tobias Nitzshe, Optimax Systems, Inc. (United States)
Daniel E. Savage, Optimax Systems, Inc. (United States)
Jonathan T. Watson, Optimax Systems, Inc. (United States)
Donald K. Henry, Optimax Systems, Inc. (United States)
Andrew A. Haefner, Optimax Systems, Inc. (United States)
Robert A. Wiederhold, Optimax Systems, Inc. (United States)

Published in SPIE Proceedings Vol. 7426:
Optical Manufacturing and Testing VIII
James H. Burge; Oliver W. Fähnle; Ray Williamson, Editor(s)

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