The well-known indium-tin-oxide is not suitable for solar cell, because of the chemical reduction, even without any hydrogen dilution. The inexpensive and non-toxic of transparent conducting Aluminum and Gallium doped ZnO (AZO and GZO) thin films have been investigated for the substitutes for the indium-tin-oxide thin films. AZO performs high transmittance at visible region, however, higher resistance than GZO. In this study, AZO and GZO composed film (GAZO) will be fabricated using DC magnetron co-sputtering deposition system to achieve lower resistance than AZO and higher transmittance than GZO. The optical and electric properties of different thickness of GAZO such as transmittance, reflection, carrier concentration, Hall mobility, and resistivity will be measured and analyzed.

Date Published: 20 August 2009
PDF: 8 pages
Proc. SPIE 7409, Thin Film Solar Technology, 74090W (20 August 2009); doi: 10.1117/12.825206

Published in SPIE Proceedings Vol. 7409:
Thin Film Solar Technology
Alan E. Delahoy; Louay A. Eldada, Editor(s)