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Proceedings Paper

Reduction of MRC error review time through the simplified and classified MRC result
Author(s): Casper W. Lee; Jason C. Lin; Frank F. Chen
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Paper Abstract

As the Manufacturing Rule Check (MRC) error counts are very huge, it has been getting difficult to review by each point and maybe some of the design errors will be ignored. It's necessary to reduce the review error counts and improve the checking methods. The paper presents an error classification function and auto-waived mechanism for decreasing the repeated MRC errors in MRC report. In auto-waived mechanism, the report will omit the error point if it is same as previous report and the defect location output will keep all of the error points for Do Not Inspection Area (DNIR) reference. (DNIR needs customer's approval). Furthermore, it is possible to develop an auto-waived function to skip the confirmed errors which is provided by customer with a marking information table or GDS/OASIS database. Besides, this paper also presents how these errors can be grouping and reducing checking time.

Paper Details

Date Published: 11 May 2009
PDF: 11 pages
Proc. SPIE 7379, Photomask and Next-Generation Lithography Mask Technology XVI, 73790X (11 May 2009); doi: 10.1117/12.824274
Show Author Affiliations
Casper W. Lee, Toppan Chunghwa Electronics Corp. (Taiwan)
Jason C. Lin, Toppan Chunghwa Electronics Corp. (Taiwan)
Frank F. Chen, Toppan Chunghwa Electronics Corp. (Taiwan)

Published in SPIE Proceedings Vol. 7379:
Photomask and Next-Generation Lithography Mask Technology XVI
Kunihiro Hosono, Editor(s)

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