
Proceedings Paper
Power spectral density specification and analysis of large optical surfacesFormat | Member Price | Non-Member Price |
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Paper Abstract
The 2-dimensional Power Spectral Density (PSD) can be used to characterize the mid- and the high-spatial frequency
components of the surface height errors of an optical surface. We found it necessary to have a complete, easy-to-use
approach for specifying and evaluating the PSD characteristics of large optical surfaces, an approach that allows one to
specify the surface quality of a large optical surface based on simulated results using a PSD function and to evaluate the
measured surface profile data of the same optic in comparison with those predicted by the simulations during the
specification-derivation process. This paper provides a complete mathematical description of PSD error, and proposes a
new approach in which a 2-dimensional (2D) PSD is converted into a 1-dimensional (1D) one by azimuthally averaging
the 2D-PSD. The 1D-PSD calculated this way has the same unit and the same profile as the original PSD function, thus
allows one to compare the two with each other directly.
Paper Details
Date Published: 17 June 2009
PDF: 12 pages
Proc. SPIE 7390, Modeling Aspects in Optical Metrology II, 73900L (17 June 2009); doi: 10.1117/12.823844
Published in SPIE Proceedings Vol. 7390:
Modeling Aspects in Optical Metrology II
Harald Bosse; Bernd Bodermann; Richard M. Silver, Editor(s)
PDF: 12 pages
Proc. SPIE 7390, Modeling Aspects in Optical Metrology II, 73900L (17 June 2009); doi: 10.1117/12.823844
Show Author Affiliations
Erkin Sidick, Jet Propulsion Lab. (United States)
Published in SPIE Proceedings Vol. 7390:
Modeling Aspects in Optical Metrology II
Harald Bosse; Bernd Bodermann; Richard M. Silver, Editor(s)
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