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Proceedings Paper

Fabricating fluorinated polyimide optical waveguide by CO2 laser direct-writing
Author(s): Xi Jin; Daqing Zhu; Xiaoyan Zeng
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Paper Abstract

Fluorinated polyimide waveguides were fabricated by CO2 laser direct-writing. The poly(amic acid) micro-region exposed by CO2 laser beam was measured with FT-IR micro-spectroscopy. The FT-IR spectra indicated that the laser imidized polyimide was semicrystalline, and the imidization degree of scanned micro-region increased with the rising of output laser power. The increased aspect ratio of waveguide and smoothness of surface can be achieved by increasing the pre-cured temperature (below 120 °C) and writing rate, and optimizing laser power and the distance between the lens and the annular aperture. The guided light was clearly confined to the core of the fabricated waveguide, which means this technique can be used for fluorinated polyimide waveguide fabrication.

Paper Details

Date Published: 18 February 2009
PDF: 7 pages
Proc. SPIE 7276, Photonics and Optoelectronics Meetings (POEM) 2008: Laser Technology and Applications, 72760O (18 February 2009); doi: 10.1117/12.823213
Show Author Affiliations
Xi Jin, Huazhong Univ. of Science and Technology (China)
Daqing Zhu, Huazhong Univ. of Science and Technology (China)
Xiaoyan Zeng, Wuhan National Lab. for Optoelectronics (China)

Published in SPIE Proceedings Vol. 7276:
Photonics and Optoelectronics Meetings (POEM) 2008: Laser Technology and Applications
Peixiang Lu; Katsumi Midorikawa; Bernd Wilhelmi, Editor(s)

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