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Proceedings Paper

Interaction of intense ultrashort XUV pulses with silicon
Author(s): R. Sobierajski; D. Klinger; M. Jurek; J. B. Pelka; L. Juha; J. Chalupský; J. Cihelka; V. Hakova; L. Vysin; U. Jastrow; N. Stojanovic; S. Toleikis; H. Wabnitz; J. Krzywinski; S. Hau-Reige; R. London
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Paper Abstract

Single shot radiation damage of bulk silicon induced by ultrashort XUV pulses was studied. The sample was chosen because it is broadly used in XUV optics and detectors where radiation damage is a key issue. It was irradiated at FLASH facility in Hamburg, which provides intense femtosecond pulses at 32.5 nm wavelength. The permanent structural modifications of the surfaces exposed to single shots were characterized by means of phase contrast optical microscopy and atomic force microscopy. Mechanisms of different, intensity dependent stages of the surface damage are described.

Paper Details

Date Published: 18 May 2009
PDF: 11 pages
Proc. SPIE 7361, Damage to VUV, EUV, and X-Ray Optics II, 736107 (18 May 2009); doi: 10.1117/12.822152
Show Author Affiliations
R. Sobierajski, Institute of Physics (Poland)
FOM-Instituut voor Plasmafysica Rijnhuizen (Netherlands)
D. Klinger, Institute of Physics (Poland)
M. Jurek, Institute of Physics (Poland)
J. B. Pelka, Institute of Physics (Poland)
L. Juha, Institute of Physics (Czech Republic)
J. Chalupský, Institute of Physics (Czech Republic)
Czech Technical Univ. (Czech Republic)
J. Cihelka, Institute of Physics (Czech Republic)
V. Hakova, Institute of Physics (Czech Republic)
L. Vysin, Institute of Physics (Czech Republic)
U. Jastrow, HASYLAB/DESY (Germany)
N. Stojanovic, HASYLAB/DESY (Germany)
S. Toleikis, HASYLAB/DESY (Germany)
H. Wabnitz, HASYLAB/DESY (Germany)
J. Krzywinski, SLAC National Accelerator Lab. (United States)
S. Hau-Reige, Lawrence Livermore National Lab. (United States)
R. London, Lawrence Livermore National Lab. (United States)

Published in SPIE Proceedings Vol. 7361:
Damage to VUV, EUV, and X-Ray Optics II
Libor Juha; Saša Bajt; Ryszard Sobierajski, Editor(s)

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