
Proceedings Paper
Evaluation of a backside-illuminated ISISFormat | Member Price | Non-Member Price |
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Paper Abstract
This paper presents preliminary evaluation results of a test sensor of the backside-illuminated ISIS, an ultra-high
sensitivity and ultra-high speed CCD image sensor. To achieve ultra-high sensitivity, the CCD image sensor employs the
following three technologies: backside illumination, cooling and Charge Carrier Multiplication (CCM). The test sensor
has been designed, fabricated and evaluated. At room temperature without cooling, the video camera has about ten-time
higher sensitivity than the previous one, which was supported by a conventional front side illumination technology.
Furthermore, the video camera can detect images at very low signal level, less than 5 e-, by using CCM at -40 degree C.
Paper Details
Date Published: 10 February 2009
PDF: 8 pages
Proc. SPIE 7126, 28th International Congress on High-Speed Imaging and Photonics, 712607 (10 February 2009); doi: 10.1117/12.821985
Published in SPIE Proceedings Vol. 7126:
28th International Congress on High-Speed Imaging and Photonics
Harald Kleine; Martha Patricia Butron Guillen, Editor(s)
PDF: 8 pages
Proc. SPIE 7126, 28th International Congress on High-Speed Imaging and Photonics, 712607 (10 February 2009); doi: 10.1117/12.821985
Show Author Affiliations
H. D. Nguyen, Kinki Univ. (Japan)
C. Vo-Le, Kinki Univ. (Japan)
V. T. S. Dao, Kinki Univ. (Japan)
K. Takehara, Kinki Univ. (Japan)
T. G. Etoh, Kinki Univ. (Japan)
Y. Kondo, Shimadzu Corp. (Japan)
H. Maruno, Shimadzu Corp. (Japan)
H. Tominaga, Shimadzu Corp. (Japan)
C. Vo-Le, Kinki Univ. (Japan)
V. T. S. Dao, Kinki Univ. (Japan)
K. Takehara, Kinki Univ. (Japan)
T. G. Etoh, Kinki Univ. (Japan)
Y. Kondo, Shimadzu Corp. (Japan)
H. Maruno, Shimadzu Corp. (Japan)
H. Tominaga, Shimadzu Corp. (Japan)
H. Soya, Shimadzu Corp. (Japan)
H. van Kuijk, DALSA Corp. (Netherlands)
J. Bosiers, DALSA Corp. (Netherlands)
W. Klaassens, DALSA Corp. (Netherlands)
G. Ingram, DALSA Corp. (Canada)
S. Singh, DALSA Corp. (Canada)
M. Lesser, Univ. of Arizona (United States)
H. van Kuijk, DALSA Corp. (Netherlands)
J. Bosiers, DALSA Corp. (Netherlands)
W. Klaassens, DALSA Corp. (Netherlands)
G. Ingram, DALSA Corp. (Canada)
S. Singh, DALSA Corp. (Canada)
M. Lesser, Univ. of Arizona (United States)
Published in SPIE Proceedings Vol. 7126:
28th International Congress on High-Speed Imaging and Photonics
Harald Kleine; Martha Patricia Butron Guillen, Editor(s)
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