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Proceedings Paper

Robust superelastic, metallic amplification unit for piezoelectric microactuators
Author(s): C. Bolzmacher; K. Bauer; U. Schmid; M. Hafez; H. Seidel
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Paper Abstract

In this work, a robust metallic amplification unit for piezoelectric microactuators is presented. The mechanism which is implemented with a sliced membrane structure made from a superelastic nickel titanium alloy is based on a mechanical lever in order to amplify the small piezoelectrically induced deformation. Therefore, increased stroke can be provided up to high frequencies. The fabrication process using laser ablation, the assembly process, the static and dynamic simulations and experimental measurements are reported. An amplification factor of 9 has been achieved for a specific load transmission point position. The dynamic response shows a quality factor of 25 at 11.97 kHz for the first mode. Compared to silicon, nickel titanium shows enhanced properties against failure and facilitates the integration process.

Paper Details

Date Published: 18 May 2009
PDF: 8 pages
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620M (18 May 2009); doi: 10.1117/12.821727
Show Author Affiliations
C. Bolzmacher, EADS Innovation Works Germany (Germany)
K. Bauer, EADS Innovation Works Germany (Germany)
U. Schmid, Vienna Univ. of Technology (Austria)
M. Hafez, Commissariat à l'Energie Atomique (France)
H. Seidel, Saarland Univ. (Germany)

Published in SPIE Proceedings Vol. 7362:
Smart Sensors, Actuators, and MEMS IV
Ulrich Schmid, Editor(s)

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