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Proceedings Paper

Design and fabrication of self-assembling micromirror arrays
Author(s): Qingdang Li; Andreas Jäkel; Volker Viereck; Jürgen Schmid; Hartmut Hillmer
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Paper Abstract

We present the potential and the benefits of actuable micromirror arrays for large area applications for daylight deflection. The described micromirror arrays are intended to be implemented into windows of buildings and to provide functionalities like daylight guiding into rooms, heat regulation and glare protection. Placed between two panes of a window, these mirrors are maintenance-free and not subject to defilement. The use of micro system technology on large areas requires very low cost processes and materials, as well as a concept with a minimum of process steps and a very easy and reliable process control. We present theoretical and technological approaches and first technological results.

Paper Details

Date Published: 18 May 2009
PDF: 8 pages
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736211 (18 May 2009); doi: 10.1117/12.821686
Show Author Affiliations
Qingdang Li, Univ. of Kassel (Germany)
Andreas Jäkel, Univ. of Kassel (Germany)
Volker Viereck, Univ. of Kassel (Germany)
Jürgen Schmid, Univ. of Kassel (Germany)
Hartmut Hillmer, Univ. of Kassel (Germany)

Published in SPIE Proceedings Vol. 7362:
Smart Sensors, Actuators, and MEMS IV
Ulrich Schmid, Editor(s)

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