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Proceedings Paper

InGaN/GaN multi-quantum-well structures and GaN micromechanical structures on silicon-on-insulator substrates
Author(s): L. S. Wang; S. Tripathy; S. J. Chua; S. Vicknesh; V. K. X. Lin; K. Y. Zang; J. Arokiaraj; J. N. Tan; A. Ramam
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Paper Abstract

We report growth of InGaN/GaN multi-quantum-wells (MQWs) structures and GaN layers on silicon-on-insulator (SOI) substrates by metalorganic chemical vapor deposition (MOCVD). The growth conditions were tuned to realize blue-green emission peaks centered around 420-495 nm from such MQWs on SOI. X-ray diffraction, atomic force microscopy, scanning electron microscopy, and photoluminescence techniques were used to characterize the MQWs. Using a combination of selective dry etching techniques, GaN micromechanical structures are demonstrated on silicon-on-insulator (SOI) substrates. The dry releasing technique employs a controlled gas phase pulse etching with non-plasma xenon difluoride (XeF2), which selectively etches the Si overlayer of SOI, thus undercutting the GaN material on top. The mechanical properties of these released microstructures are characterized by micro-Raman spectroscopy. Such approach to realize multi-color light-emitting InGaN/GaN MQW structures and GaN micromechanical structures on SOI substrates is suitable for the integration of InGaN/GaN-based optoelectronic structures on SOI-based micro-opto-electromechanical systems (MOEMS) and sensors.

Paper Details

Date Published: 19 February 2009
PDF: 8 pages
Proc. SPIE 7279, Photonics and Optoelectronics Meetings (POEM) 2008: Optoelectronic Devices and Integration, 72790U (19 February 2009); doi: 10.1117/12.821474
Show Author Affiliations
L. S. Wang, Huazhong Univ. of Science and Technology (China)
S. Tripathy, A*STAR (Singapore)
S. J. Chua, A*STAR (Singapore)
S. Vicknesh, A*STAR (Singapore)
V. K. X. Lin, A*STAR (Singapore)
K. Y. Zang, A*STAR (Singapore)
J. Arokiaraj, A*STAR (Singapore)
J. N. Tan, A*STAR (Singapore)
A. Ramam, A*STAR (Singapore)

Published in SPIE Proceedings Vol. 7279:
Photonics and Optoelectronics Meetings (POEM) 2008: Optoelectronic Devices and Integration
Liming Zhang; Michael J. O'Mahony, Editor(s)

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