In order to further improve the ultra-precision measuring accuracy of circular profile, the sources of probe offset error was analyzed and one-parameter measurement model was established that with probe offset parameter only, and it was concluded that probe offset has a significant effect on the measurement of an object with a small size or large profile deviation; the two-parameter measurement model that with probe offset error d and eccentricity error (e, &agr;) was simultaneously analyzed, and the accurate interaction relationship between d and e is obtained. Simulation results show that probe offset error has a significant amplifying action to eccentricity error, and the measurement error increases as probe offset error increase. This paper provides the basis for further improvement of ultra-precision measuring accuracy of circular profile.

Date Published: 12 January 2009
PDF: 6 pages
Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 71330G (12 January 2009); doi: 10.1117/12.821218

Published in SPIE Proceedings Vol. 7133:
Fifth International Symposium on Instrumentation Science and Technology
Jiubin Tan; Xianfang Wen, Editor(s)