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Proceedings Paper

Surface reactions of (sub)monolayers of small organic species on oxidized silicon
Author(s): N. Salingue; D. Lingenfelser; P. Prunici; P. Hess
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Paper Abstract

The preparation of (sub)monolayers of small and short-chain organic molecules on oxide-covered silicon is described. The molecular end groups and their chemical reactions were characterized by attenuated total reflection Fourier transform infrared (ATR-FTIR) spectroscopy, spectroscopic ellipsometry (IR-UV), laserinduced desorption of monolayers (LIDOM), X-ray photoelectron spectroscopy (XPS), and contact-angle experiments. Surface species were identified and their reactions were monitored by FTIR analysis of characteristic vibrational modes. This includes bottom-up synthesis of siloxane chains, diverse reactions of double bonds, and specific molecular transformations such as the Diels-Alder reaction. Layer thicknesses could be estimated with a sensitivity of ~0.02 nm and accuracy of ~0.05 nm by oxidation of the hydrocarbons. This was achieved by in situ real-time detection of the corresponding thickness changes by spectroscopic ellipsometry. From time-of-flight (TOF) experiments, which provided the desorption temperature and mass of the emitted species, the thermal stability, chemical transformation, and fragmentation pattern of chemisorbed species could be extracted. To analyze the hydrophilic or hydrophobic nature of functionalized surfaces the surface energy and wettability were determined.

Paper Details

Date Published: 28 May 2009
PDF: 12 pages
Proc. SPIE 7364, Nanotechnology IV, 73640F (28 May 2009); doi: 10.1117/12.821176
Show Author Affiliations
N. Salingue, Univ. of Heidelberg (Germany)
D. Lingenfelser, Univ. of Heidelberg (Germany)
P. Prunici, Univ. of Heidelberg (Germany)
P. Hess, Univ. of Heidelberg (Germany)

Published in SPIE Proceedings Vol. 7364:
Nanotechnology IV
Achim Wixforth, Editor(s)

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