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Proceedings Paper

3D measurement system of micro-organization based on two-ray-path scanning
Author(s): Xiaolei Shan; Dongxian Zhang; Chao Liu; Haijun Zhang
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Paper Abstract

A 3D measurement system of micro organization based on two-ray-path scanning was developed. This article introduced the principle and setup of the system. Experiments were carried out to measure the three-dimensional shape of some micro organizations. The results showed that this system could measure accurately not only the thickness of each part of the micro organization, but also can show its three-dimensional shape quickly and accurately. The vertical error was less than 2 μm. This system has advantages of compact structure, accurate detection, and high reliability, and can realize nondestructive measurement of micro organization.

Paper Details

Date Published: 31 December 2008
PDF: 6 pages
Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 713031 (31 December 2008); doi: 10.1117/12.819668
Show Author Affiliations
Xiaolei Shan, Zhejiang Univ. (China)
Dongxian Zhang, Zhejiang Univ. (China)
Chao Liu, Zhejiang Univ. (China)
Haijun Zhang, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 7130:
Fourth International Symposium on Precision Mechanical Measurements
Yetai Fei; Kuang-Chao Fan; Rongsheng Lu, Editor(s)

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