To reduce the theoretical measurement error caused by a high acceleration in fast ultra-precision laser heterodyne interferometry, a model is proposed. This model is about how the displacement measurement precision is affected by the acceleration of the measuring prism in a multi-pass heterodyne interferometer. In the model, the integrals of Nv²/c and Nax/c are added on the basis of a conventional heterodyne interferometer model. It shows, that in the conventional model the measurement error increases with increasing measurement acceleration. An error compensation method is proposed, which uses numerical integration to obtain the real time speed and acceleration. Corrected data can be acquired by using an error correction formula. Simulation results show, that the measurement error can be reduced by this method from 10nm to 0.03nm when the displacement of the measuring prism is 500mm and the uniform acceleration of the measuring prism of a double pass interferometer equals g.

Date Published: 31 December 2008
PDF: 6 pages
Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 713030 (31 December 2008); doi: 10.1117/12.819667

Published in SPIE Proceedings Vol. 7130:
Fourth International Symposium on Precision Mechanical Measurements
Yetai Fei; Kuang-Chao Fan; Rongsheng Lu, Editor(s)