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Proceedings Paper

Effect on the measurement precision of a multi-pass heterodyne interferometer by an acceleration and compensation method
Author(s): Hongfang Chen; Jiubin Tan; Zhi Zhong
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Paper Abstract

To reduce the theoretical measurement error caused by a high acceleration in fast ultra-precision laser heterodyne interferometry, a model is proposed. This model is about how the displacement measurement precision is affected by the acceleration of the measuring prism in a multi-pass heterodyne interferometer. In the model, the integrals of Nv2/c and Nax/c are added on the basis of a conventional heterodyne interferometer model. It shows, that in the conventional model the measurement error increases with increasing measurement acceleration. An error compensation method is proposed, which uses numerical integration to obtain the real time speed and acceleration. Corrected data can be acquired by using an error correction formula. Simulation results show, that the measurement error can be reduced by this method from 10nm to 0.03nm when the displacement of the measuring prism is 500mm and the uniform acceleration of the measuring prism of a double pass interferometer equals g.

Paper Details

Date Published: 31 December 2008
PDF: 6 pages
Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 713030 (31 December 2008); doi: 10.1117/12.819667
Show Author Affiliations
Hongfang Chen, Beijing Univ. of Technology (China)
Jiubin Tan, Harbin Institute of Technology (China)
Zhi Zhong, Harbin Engineering Univ. (China)

Published in SPIE Proceedings Vol. 7130:
Fourth International Symposium on Precision Mechanical Measurements
Yetai Fei; Kuang-Chao Fan; Rongsheng Lu, Editor(s)

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