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Proceedings Paper

Subdivision circuit design for nanometer grating based second order moire fringe
Author(s): Xiushui Ma; Shenwang Lin; Xiaoqi He; Rusheng Yan; Yetai Fei; Wei Zu
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Paper Abstract

Two groups of indicated grating and scale grating produce two groups of first order Moire fringe. Two groups of first order Moire fringe interfere and produce second order Moire fringe, and then we can use the four-phase photoelectric sensors to get two channels of enlarged second order Moire fringe's sine wave signal, their phase difference is π/2. Based on chips of QA740204 and QA740210, this paper designs the 20 times subdivide circuit to achieve the nano-measurement resolution and when the grating's move speed closes to the limit value or exceeding the limit value, the critical state alert and overspeed alert circuit can be provided in measuring.

Paper Details

Date Published: 31 December 2008
PDF: 6 pages
Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71300V (31 December 2008); doi: 10.1117/12.819568
Show Author Affiliations
Xiushui Ma, Zhejiang Univ. (China)
Shenwang Lin, Far East Univ. (Taiwan)
Xiaoqi He, Zhejiang Univ. (China)
Rusheng Yan, Anhui Univ. (China)
Yetai Fei, Hefei Univ. of Technology (China)
Wei Zu, Zhejiang Univ. (China)
Anhui Univ. (China)

Published in SPIE Proceedings Vol. 7130:
Fourth International Symposium on Precision Mechanical Measurements
Yetai Fei; Kuang-Chao Fan; Rongsheng Lu, Editor(s)

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