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Proceedings Paper

Failure analysis and simulation for micro-cantilever
Author(s): Fengli Liu; Yongping Hao
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Paper Abstract

Micro-cantilever structure is flexible and liable to be destroyed compared its volume with its area. Failure mode and effect analysis can be predicted at an early stage of the micro-beam design. Stiction is a main failure mode for cantilever in its manufacture process and operation. Under the load shock, if the contact length reached the limit length, the restoration energy in micro-cantilever couldn't resist the stiction energy, the micro-cantilever would stiction on the substrate. Pull-in was a main failure mode for electrostatic micro-cantilever. The pull-in voltage was obtained by mechanical and electrical couple analysis on the base of the FEM model.

Paper Details

Date Published: 31 December 2008
PDF: 6 pages
Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71300S (31 December 2008); doi: 10.1117/12.819565
Show Author Affiliations
Fengli Liu, Shenyang Ligong Univ. (China)
Yongping Hao, Shenyang Ligong Univ. (China)

Published in SPIE Proceedings Vol. 7130:
Fourth International Symposium on Precision Mechanical Measurements
Yetai Fei; Kuang-Chao Fan; Rongsheng Lu, Editor(s)

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