Proceedings Paper
A system-level simulation of force-balance MEMS accelerometers by VHDL_AMS| Format | Member Price | Non-Member Price |
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Paper Abstract
Micromachined accelerometers are one of the most widely used MEMS transducers. The theory of force-balance MEMS
accelerometers is presented in the thesis. Meanwhile the paper accomplishes the system-level simulation and analysis of
the force-balance MEMS accelerometer with different structure parameters. Based on the analysis, the conclusion is that
the parameters of folded-spring (such as the length of the beam, the width of the beam) especially influence the output
sensitivity.
Paper Details
Date Published: 31 December 2008
PDF: 6 pages
Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71300R (31 December 2008); doi: 10.1117/12.819564
Published in SPIE Proceedings Vol. 7130:
Fourth International Symposium on Precision Mechanical Measurements
Yetai Fei; Kuang-Chao Fan; Rongsheng Lu, Editor(s)
PDF: 6 pages
Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71300R (31 December 2008); doi: 10.1117/12.819564
Show Author Affiliations
Xiaochuan Tang, Harbin Institute of Technology (China)
Yufeng Zhang, Harbin Institute of Technology (China)
Yufeng Zhang, Harbin Institute of Technology (China)
Weiping Chen, Harbin Institute of Technology (China)
Xiaowei Liu, Harbin Institute of Technology (China)
Xiaowei Liu, Harbin Institute of Technology (China)
Published in SPIE Proceedings Vol. 7130:
Fourth International Symposium on Precision Mechanical Measurements
Yetai Fei; Kuang-Chao Fan; Rongsheng Lu, Editor(s)
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