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Proceedings Paper

The feedback system of nano-vibration isolation based on tunneling effect
Author(s): Fan Chen; Xing Fu; Meng-chao Li; Feng-ming Sun
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Paper Abstract

Scanning tunneling microscope (STM), since it appearance has become an essential tool for investigate and fabricate in nano scale. It's required a long-term stability of the tip-sample tunnel junction to maintain the high resolution. Focus on this point, a great deal of effort has been devoted to improve the performance of the stability of the STM working state. The designed system run in a feedback closed-loop by implementing in a digital signal processor(DSP), in which real-time output is calculated through proper control algorithm to response to the environment noise. It shows a good effect in experiment in Nano-vibration isolation.

Paper Details

Date Published: 31 December 2008
PDF: 6 pages
Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71300Q (31 December 2008); doi: 10.1117/12.819563
Show Author Affiliations
Fan Chen, Tianjin Univ. (China)
Xing Fu, Tianjin Univ. (China)
Meng-chao Li, Tianjin Univ. (China)
Feng-ming Sun, Tianjin Univ. (China)

Published in SPIE Proceedings Vol. 7130:
Fourth International Symposium on Precision Mechanical Measurements
Yetai Fei; Kuang-Chao Fan; Rongsheng Lu, Editor(s)

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