
Proceedings Paper
Development of a touch trigger probe for micro/nano CMMFormat | Member Price | Non-Member Price |
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Paper Abstract
Conventional Coordinate Measuring Machines (CMMs) restrict the possibilities for measuring micro mechanical
products and noncontact optical measuring methods are not suitable for true three-dimensional measurements. The
integrated combination of optical sensors and mechanical transducers employed in this research makes an ideal low cost
and high precision touch trigger probe possible to measure miniature components. This touch probe is composed of a
stylus with a fiber sphere (310μm in diameter) and a sensor integrated floating plate. The ball tip is fabricated using
optical fiber with melting and solidification processes. The stylus is attached to a floating plate, which is connected to the
probe housing via four micro wires. The shape and dimension of the floating plate, as well as the length and diameter of
the micro wire, are determined according to the selected contact forces. When the probe tip is displaced the wires will
perform elastic deformation and four mirrors mounted onto the four-legged plate will amplify the up/down displacement
at each mirror position. These displacements can be detected by four corresponding laser focus probes. Experiments were
carried out to test the unidirectional touch trigger repeatability. The standard deviation is less than 10nm. The probe
structure and the experimental results were also analyzed and validated with finite element AnSYS software.
Paper Details
Date Published: 31 December 2008
PDF: 6 pages
Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71300K (31 December 2008); doi: 10.1117/12.819556
Published in SPIE Proceedings Vol. 7130:
Fourth International Symposium on Precision Mechanical Measurements
Yetai Fei; Kuang-Chao Fan; Rongsheng Lu, Editor(s)
PDF: 6 pages
Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71300K (31 December 2008); doi: 10.1117/12.819556
Show Author Affiliations
Wei-Li Wang, Hefei Univ. of Technology (China)
Kuang-Chao Fan, Hefei Univ. of Technology (China)
National Taiwan Univ. (Taiwan)
Kuang-Chao Fan, Hefei Univ. of Technology (China)
National Taiwan Univ. (Taiwan)
Ye-Jin Chen, Hefei Univ. of Technology (China)
Ye-Tai Fei, Hefei Univ. of Technology (China)
Ye-Tai Fei, Hefei Univ. of Technology (China)
Published in SPIE Proceedings Vol. 7130:
Fourth International Symposium on Precision Mechanical Measurements
Yetai Fei; Kuang-Chao Fan; Rongsheng Lu, Editor(s)
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