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Proceedings Paper

All optically-driven MEMS deformable device via an array of photodetectors
Author(s): Bahareh Haji-Saeed; Jed Khoury; Kenneth Vaccaro; Charles L. Woods; John Kierstead; Brian Krejca; Andrew Davis; William D. Goodhue
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Paper Abstract

We are in the process of developing an all optically driven, deformable mirror device through the integration of an array of photodetectors with an array of MEMS deformable mirror devices. In this paper we demonstrate the optical actuation of a single-pixel, deformable-mirror MEMS device through a direct cascade with a photodetector. Deformation is quasilinear at low light intensities, and saturates at higher intensities. We also describe the fabrication of an integrated device consisting of an all optically addressed deformable-mirror MEMS suspended over a p-i-n photodetector. Initial demonstration of optical actuation of the deformable mirror using the newly integrated device is also presented. We have fabricated several membrane materials, membrane structures, and photodetector arrays.

Paper Details

Date Published: 30 April 2009
PDF: 13 pages
Proc. SPIE 7322, Photonic Microdevices/Microstructures for Sensing, 73220L (30 April 2009); doi: 10.1117/12.818596
Show Author Affiliations
Bahareh Haji-Saeed, Air Force Research Lab. (United States)
Jed Khoury, Air Force Research Lab. (United States)
Kenneth Vaccaro, Air Force Research Lab. (United States)
Charles L. Woods, Air Force Research Lab. (United States)
John Kierstead, Solid State Scientific Corp. (United States)
Brian Krejca, Solid State Scientific Corp. (United States)
Andrew Davis, Solid State Scientific Corp. (United States)
William D. Goodhue, Univ. of Massachusetts, Lowell (United States)

Published in SPIE Proceedings Vol. 7322:
Photonic Microdevices/Microstructures for Sensing
Hai Xiao; Xudong Fan; Anbo Wang, Editor(s)

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