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Proceedings Paper

Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter with double feedback control for real-time distance measurement
Author(s): Osami Sasaki; Daiki Matsubara; Takamasa Suzuki
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Paper Abstract

Optical path difference (OPD) and amplitude of a sinusoidal wavelength-scanning (SWS) are controlled with double feedback control system in an SWS interferometer, so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength. An acousto-optic tunable filter (AOTF) is adopted as a wavelength-scanning device. The frequency of the SWS is 10 KHZ, and the measurement time required to reach a stable point of the control system is about 7ms. The measurement range is from 65 m to 190 m with the measurement error less than 4nm.

Paper Details

Date Published: 2 February 2009
PDF: 7 pages
Proc. SPIE 7160, 2008 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Applications, 71600L (2 February 2009); doi: 10.1117/12.817855
Show Author Affiliations
Osami Sasaki, Niigata Univ. (Japan)
Daiki Matsubara, Niigata Univ. (Japan)
Takamasa Suzuki, Niigata Univ. (Japan)


Published in SPIE Proceedings Vol. 7160:
2008 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Applications
Shenghua Ye; Guangjun Zhang; Jun Ni, Editor(s)

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