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Proceedings Paper

Two-dimensional phononic crystal slab defect mode micromechanical resonators
Author(s): Saeed Mohammadi; Ali A. Eftekhar; Abdelkrim Khelif; William D. Hunt; Ali Adibi
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Paper Abstract

By creating line defects cavities in the structure of a phononic crystal (PC) made by etching a hexagonal (honeycomb) array of holes in a 15μm-thick slab of silicon, high-Q PC resonators are fabricated and tested using a complimentary-metal- oxide-semiconductor-compatible process. The radii of the holes are approximately 6.4μm and the spacing between nearest holes is 15μm. We show that the complete phononic band gap of the PC structure supports resonant modes with quality factors of more than 6000 at frequencies as high as 126MHz in the resonator structure. The very good confinement of acoustic energy is achieved by using only a few PC layers confining the cavity region. The calculated frequencies of resonance of the structure using finite element method are in a very good agreement with the experimental data. The performance of these PC resonator structures makes them excellent candidates for wireless communication and sensing applications.

Paper Details

Date Published: 16 February 2009
PDF: 8 pages
Proc. SPIE 7223, Photonic and Phononic Crystal Materials and Devices IX, 72230H (16 February 2009); doi: 10.1117/12.816990
Show Author Affiliations
Saeed Mohammadi, Georgia Institute of Technology (United States)
Ali A. Eftekhar, Georgia Institute of Technology (United States)
Abdelkrim Khelif, Georgia Institute of Technology-CNRS Joint Lab. (United States)
William D. Hunt, Georgia Institute of Technology (United States)
Ali Adibi, Georgia Institute of Technology (United States)

Published in SPIE Proceedings Vol. 7223:
Photonic and Phononic Crystal Materials and Devices IX
Ali Adibi; Shawn-Yu Lin; Axel Scherer, Editor(s)

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