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Proceedings Paper

EUV and debris characteristics of a laser-plasma tin-dioxide colloidal target
Author(s): Shoichi Kubodera; Masanori Kaku; Shunsuke Touge; Masahito Katto
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Paper Abstract

Characteristics of extreme ultraviolet (EUV) and debris emissions as well as debris reduction have been investigated for a laser-produced plasma (LPP) EUV source by using a colloidal/liquid jet target containing tin dioxide nanoparticles and tin chloride. The amount of deposited debris on a silicon witness plate was determined by a total laser energy irradiated onto a target. Double-pulse laser irradiation was effective for improving the EUV conversion efficiency as a result of plasma regulation. It was, however, not effective for reducing the deposited debris from a colloidal target with nanoparticles. In situ low-temperature heating of the witness plate was effective to reduce the amount of deposited debris. Room-temperature photon processing using an incoherent vacuum ultraviolet excimer lamp at 126 nm deoxidized a deposited tin oxide layer. In addition to these active debris reduction methods, the use of a tin chloride liquid target at a certain concentration passively reduced the amount of deposited debris as a result of production of chlorine atoms that sputtered and/or etched deposition. The EUV CE of more than 1% was observed from a tin chloride target by using double-pulse laser irradiation.

Paper Details

Date Published: 21 April 2009
PDF: 7 pages
Proc. SPIE 7131, XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 71311O (21 April 2009); doi: 10.1117/12.816882
Show Author Affiliations
Shoichi Kubodera, Univ. of Miyazaki (Japan)
Masanori Kaku, Univ. of Miyazaki (Japan)
Shunsuke Touge, Univ. of Miyazaki (Japan)
Masahito Katto, Univ. of Miyazaki (Japan)

Published in SPIE Proceedings Vol. 7131:
XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
Rui Vilar; Olinda Conde; Marta Fajardo; Luís O. Silva; Margarida Pires; Andrei Utkin, Editor(s)

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