
Proceedings Paper
Model-based adaptive fragmentationFormat | Member Price | Non-Member Price |
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Paper Abstract
Rule-based fragmentation has been used for many years in Optical Proximity
Correction (OPC). It breaks the edge of polygons into small pieces according to the
pre-defined rule based on the topography and context before model-based OPC.
Although it works well in most case, it can not place the fragment point onto the
proper position which decided by inherent Optical and process requirement
sometimes.
In this paper, an adaptive fragmentation is proposed. The polygon is first dissected
according to the traditional rule. In the following iteration, the edge is re-fragmented,
in which some fragments are deleted and some new fragments are created, according
to their image properties. Using this method, the dissection point can be placed in the
right position. It can improve the correction accuracy and eliminate the unwanted
fragment at the same time.
Paper Details
Date Published: 12 March 2009
PDF: 5 pages
Proc. SPIE 7275, Design for Manufacturability through Design-Process Integration III, 72751I (12 March 2009); doi: 10.1117/12.814833
Published in SPIE Proceedings Vol. 7275:
Design for Manufacturability through Design-Process Integration III
Vivek K. Singh; Michael L. Rieger, Editor(s)
PDF: 5 pages
Proc. SPIE 7275, Design for Manufacturability through Design-Process Integration III, 72751I (12 March 2009); doi: 10.1117/12.814833
Show Author Affiliations
Daisy Liu, Semiconductor Manufacturing International Corp. (China)
Cheng He Li, Semiconductor Manufacturing International Corp. (China)
Cheng He Li, Semiconductor Manufacturing International Corp. (China)
Xiao Hui Kang, Mentor Graphics Corp. (China)
Published in SPIE Proceedings Vol. 7275:
Design for Manufacturability through Design-Process Integration III
Vivek K. Singh; Michael L. Rieger, Editor(s)
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