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Proceedings Paper

Characterisation of laser marks using digital holographic microscopy
Author(s): Vijay Raj Singh; Oi Choo Chee; Eddy Sim; Anand Asundi
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Paper Abstract

The inspection and characterisation of laser marks using digital holographic microscopy (DHM) is presented in this paper. A DHM system in transmission mode was designed and the reconstruction algorithm for this configuration was investigated. The software was developed to provide live reconstruction of holograms for real time numerical evaluation of amplitude and phase contrast images. A CO2 laser-based marking system was employed to create marks on glass substrates. By analysing the quality, 3D profile measurement, and material distribution of the marked area, the parameters of the laser system could be optimised to achieve the desired mark. The phase contrast images provide quantitative refractive index analysis and 3D profile studies. The results were compared with those obtained using white light confocal microscopy. The capabilities and advantages of the DHM system for the analysis of laser marks are also presented.

Paper Details

Date Published: 3 October 2008
PDF: 9 pages
Proc. SPIE 7155, Ninth International Symposium on Laser Metrology, 715509 (3 October 2008); doi: 10.1117/12.814729
Show Author Affiliations
Vijay Raj Singh, NACOI (Singapore)
Oi Choo Chee, NACOI (Singapore)
Eddy Sim, NACOI (Singapore)
Anand Asundi, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 7155:
Ninth International Symposium on Laser Metrology
Chenggen Quan; Anand Asundi, Editor(s)

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