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Proceedings Paper

Study on key algorithm for scanning white-light interferometry
Author(s): Ailing Tian; Chunhui Wang; Zhuangde Jiang; Hongjun Wang; Bingcai Liu
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Paper Abstract

Determining the location of the zero order fringes is one of the key aspects in scanning white-light interferometry. The measurement principle of the scanning white-light interferometry is introduced at first; then the location of the zero order fringes as calculated by four different algorithms; namely Weight-center, Phase-shift, Frequency Domain Analysis (FDA), and Coherent Correlation are compared. Finally, numerical simulations on random generated surfaces are done to reach conclusions by comparing and analyzing the results. The research is important in the understanding and development of white-light interferometry.

Paper Details

Date Published: 3 October 2008
PDF: 8 pages
Proc. SPIE 7155, Ninth International Symposium on Laser Metrology, 71552N (3 October 2008); doi: 10.1117/12.814597
Show Author Affiliations
Ailing Tian, Xi'an Technological Univ. (China)
Chunhui Wang, Xi'an Technological Univ. (China)
Zhuangde Jiang, Xi'an Jiaotong Univ. (China)
Hongjun Wang, Xi'an Technological Univ. (China)
Bingcai Liu, Xi'an Technological Univ. (China)

Published in SPIE Proceedings Vol. 7155:
Ninth International Symposium on Laser Metrology
Chenggen Quan; Anand Asundi, Editor(s)

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