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Proceedings Paper

Study on topography measurement of ultra-smooth surface
Author(s): Yuhe Li; XiaoLei Tong; Haoshan Lin; Huiyu Li; Qingxiang Li
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Paper Abstract

With the development of super precision machining technology, the requirement for the precision of super-smooth surfaces measurement has reached ever-higher levels. In this paper, we adopt the phase-shifting interferential microscope technology, and present a kind of algorithm called Geodesic Erosion which aims at eliminating noises in the wrapping phase image such as abrupt phase changes, holes, points with low modulation, etc. Experiments show that the system is effective to remove noises in the wrapping phase image and successful to achieve the unwrapping phase image. The accuracy of this system may attain nanometer magnitude, while can also meet the topography measurement requirement for the super-smooth surfaces perfectly.

Paper Details

Date Published: 3 October 2008
PDF: 6 pages
Proc. SPIE 7155, Ninth International Symposium on Laser Metrology, 71552J (3 October 2008); doi: 10.1117/12.814593
Show Author Affiliations
Yuhe Li, Tsinghua Univ. (China)
XiaoLei Tong, Tsinghua Univ. (China)
Haoshan Lin, Tsinghua Univ. (China)
Huiyu Li, Tsinghua Univ. (China)
Qingxiang Li, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 7155:
Ninth International Symposium on Laser Metrology
Chenggen Quan; Anand Asundi, Editor(s)

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