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Proceedings Paper

Adaptive confocal system for 3-D profiling
Author(s): Ravi Kumar K.; Vernon Jialiang Shen; Amitava Talukdar; Anand Asundi
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Paper Abstract

Optical profilometers for micrometer resolutions are getting increasingly popular for non-contact measurement of surface profiles. Confocal profilometer is one such optical technique which can pick up sub-micron height variations of the object surface. Though the system is a single point measurement scanning in the X-Y directions enables one to plot the 3-D profile of the surface. However, the Z-scanning range is limited to ±1mm. In this work we report a system which can adapt itself to widen the scanning range in the Z-direction. For increasing the scan range we have added another translation stage in the Z axis which adapts itself when the system profiles a surface with step heights more than its original range. The X-Y-Z translation stage is connected to the computer and is controlled using a LabVIEW program. The 3-D plot is obtained by plotting the Z-values from the confocal system to the corresponding X-Y position of the translation stage. When ever the system goes out of range the Z translation stage is increased or decreased thus adapting itself to plot a 3D profile of the specimen.

Paper Details

Date Published: 3 October 2008
PDF: 7 pages
Proc. SPIE 7155, Ninth International Symposium on Laser Metrology, 71551W (3 October 2008); doi: 10.1117/12.814569
Show Author Affiliations
Ravi Kumar K., Nanyang Technological Univ. (Singapore)
Vernon Jialiang Shen, Nanyang Technological Univ. (Singapore)
Amitava Talukdar, Nanyang Technological Univ. (Singapore)
Anand Asundi, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 7155:
Ninth International Symposium on Laser Metrology
Chenggen Quan; Anand Asundi, Editor(s)

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