
Proceedings Paper
Random-phase-shift Fizeau interferometerFormat | Member Price | Non-Member Price |
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Paper Abstract
In the context of this article we demonstrate a novel Fizeau interferometric system that copes with the presence of
vibrations. Besides the conventional high spatial, but low temporal resolution detector system (the CCD camera) used in
phase shifting interferometry, an additional high temporal, but low spatial resolution detector system was integrated, in
order to measure the random phase shifts that are induced under the influence of the vibrations. The additional sensor
consists of three photodiodes. The acquired analog signals enable the measurement of the occurring phase shifts at three
non-collinear locations on the test surface. Under the assumption of the rigid body shifts and tilts of the test object, the
resulting phase shifts at the three individual locations enable the determination of the random phase shifts over the entire
image aperture. While the random oscillations of the test object are continuously measured, the CCD camera acquires
several interferograms. In consequence, a phase shifting algorithm for random phase shifts was applied. In order to prove
the validity of the new interferometer, a test surface of known topography was measured. The results of the
measurements in presence of vibrations show very good concordance with the surface data given by the supplier. The
analysis of the root mean square (RMS) over ten different measurements shows a measurement repeatability of about
0.004 waves (approximately 2.5 nm for 632.8 nm laser wavelength).
Paper Details
Date Published: 3 October 2008
PDF: 11 pages
Proc. SPIE 7155, Ninth International Symposium on Laser Metrology, 71550S (3 October 2008); doi: 10.1117/12.814528
Published in SPIE Proceedings Vol. 7155:
Ninth International Symposium on Laser Metrology
Chenggen Quan; Anand Asundi, Editor(s)
PDF: 11 pages
Proc. SPIE 7155, Ninth International Symposium on Laser Metrology, 71550S (3 October 2008); doi: 10.1117/12.814528
Show Author Affiliations
Nicolae Radu Doloca, Technische Univ. Braunschweig (Germany)
Rainer Tutsch, Technische Univ. Braunschweig (Germany)
Published in SPIE Proceedings Vol. 7155:
Ninth International Symposium on Laser Metrology
Chenggen Quan; Anand Asundi, Editor(s)
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