Share Email Print

Proceedings Paper

Photoresist stabilization for double patterning using 172 nm photoresist curing
Author(s): Thomas I. Wallow; Junyan Dai; Charles R. Szmanda; Hiram Cervera; Chi Truong; Nikolaos Bekiaris; Jong-Wook Kye; Ryoung-Han Kim; Harry J. Levinson; Glen Mori
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

We describe progress in low-k1 factor double patterning using 172 nm ultraviolet (UV) curing as a resist stabilization method. Factors that have contributed to enhanced patterning capability include a) resists design and optimization for both patterning and UV curing; b) use of unique R&D tooling capabilities to rapidly identify and optimize key process variables; c) development of simple process metrics for characterizing double patterning process quality, and d) use of 172 nm-resistant antireflective materials. A designed resist, XP-7600A, was selected for detailed evaluation based on superior patterning and curing behavior (less than 10 percent volumetric shrinkage during cure.) Process optimization on 172 nm damage-prone antireflective coatings produced 60 nm cross-grid contact holes at 0.93 NA (litho k1 = 0.28) with good uniformity when an ancillary 150 °C post-UV bake was used. Additional optimization on improved antireflective coatings yielded superior process latitude (>20 percent 172 nm dose latitude) and also demonstrated that a UV-cure-only resist stabilization process flow may be attainable. Under optimized conditions, highly uniform 60 nm half-pitch cross-grid contacts with cross-sectional area uniformity (1σ) of approximately 200 nm2 (5 percent) are produced at 135 nm resist film thickness.

Paper Details

Date Published: 1 April 2009
PDF: 10 pages
Proc. SPIE 7273, Advances in Resist Materials and Processing Technology XXVI, 72730D (1 April 2009); doi: 10.1117/12.814468
Show Author Affiliations
Thomas I. Wallow, GlobalFoundries (United States)
Junyan Dai, Sokudo Co., Ltd. (United States)
Charles R. Szmanda, Rohm and Haas Electronic Materials (United States)
Hiram Cervera, Sokudo Co., Ltd. (United States)
Chi Truong, Rohm and Haas Electronic Materials (United States)
Nikolaos Bekiaris, Sokudo Co., Ltd. (United States)
Jong-Wook Kye, GlobalFoundries (United States)
Ryoung-Han Kim, GlobalFoundries (United States)
Harry J. Levinson, GlobalFoundries (United States)
Glen Mori, Sokudo Co., Ltd. (United States)

Published in SPIE Proceedings Vol. 7273:
Advances in Resist Materials and Processing Technology XXVI
Clifford L. Henderson, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?