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Proceedings Paper

Measurement of particle flux at the intermediate focus of a DPP source
Author(s): J. Sporre; R. Raju; D. N. Ruzic; V. Surla; F. Goodwin
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Paper Abstract

At CPMI, we built a prototype portable, modified electrostatic spherical sector analyzer (ESA) device incorporating a neutral detector; investigated its capabilities for measuring energetic neutrals; and report results in this paper. This detector at the IF will contain a quartz crystal microbalance (QCM), Si witness plate for ex situ analysis, a set of microchannel plates (MCPs) with corresponding ion-diverting apparatus, Faraday cup as well as triple Langmuir probe. These detectors will be capable of quantifying total particle flux, neutral particle flux, and charged particle flux. To verify the capabilities of the detector, CPMI constructed a mock collector optic, which was placed inside the experimental chamber attached to CPMI's XTS 13-35 EUV source. This mock-up simulates the reflection of debris created by discharge-produced plasma (DPP), although it will not be capable of reflecting the EUV light. Recent results on the neutral, charged particle flux, and the carbon and oxygen contamination on a Si witness plate out of the line of sight of the Z-pinch are reported in this paper.

Paper Details

Date Published: 18 March 2009
PDF: 10 pages
Proc. SPIE 7271, Alternative Lithographic Technologies, 727137 (18 March 2009); doi: 10.1117/12.814225
Show Author Affiliations
J. Sporre, Univ. of Illinois at Urbana-Champaign (United States)
R. Raju, Univ. of Illinois at Urbana-Champaign (United States)
D. N. Ruzic, Univ. of Illinois at Urbana-Champaign (United States)
V. Surla, Univ. of Illinois at Urbana-Champaign (United States)
F. Goodwin, SEMATECH, Inc. (United States)

Published in SPIE Proceedings Vol. 7271:
Alternative Lithographic Technologies
Frank M. Schellenberg; Bruno M. La Fontaine, Editor(s)

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