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Proceedings Paper

Precise evaluation of zero-CTE temperature of EUVL-grade TiO2-SiO2 ultra-low-expansion glass using the line-focus-beam ultrasonic material characterization system
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Paper Abstract

This paper presents a calibration line between leaky surface acoustic wave (LSAW) velocities (VLSAW) and coefficient-of-thermal-expansion (CTE) characteristics for TiO2-doped SiO2 (TiO2-SiO2) glass to evaluate the absolute CTE by the line-focus-beam ultrasonic material characterization (LFB-UMC) system. Commercial TiO2-SiO2 ultra-low-expansion glass and synthetic silica glass were selected as specimens. We measured VLSAW by the LFB-UMC system and CTE characteristics by dilatometers, and obtained relationships among VLSAW, CTE at 22°C {CTE(22°C)} and zero-CTE temperature {T(zero-CTE)}. Resolutions of CTE(22°C) and T(zero-CTE) determined by the LSAW velocity measurement were estimated as ±0.72 (ppb/K) and ±0.14°C (±2σ, σ. standard deviation) at 225 MHz. Both manufacturers and users can precisely inspect T(zero-CTE) for all EUVL-grade ultra-low-expansion glass substrates by this indirect evaluation method using the calibration line.

Paper Details

Date Published: 18 March 2009
PDF: 6 pages
Proc. SPIE 7271, Alternative Lithographic Technologies, 72713D (18 March 2009); doi: 10.1117/12.814179
Show Author Affiliations
Jun-ichi Kushibiki, Tohoku Univ. (Japan)
Mototaka Arakawa, Tohoku Univ. (Japan)

Published in SPIE Proceedings Vol. 7271:
Alternative Lithographic Technologies
Frank M. Schellenberg; Bruno M. La Fontaine, Editor(s)

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