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Proceedings Paper

Partially coherent image computation using elementary functions
Author(s): Arlene Smith; Anna Burvall; Christopher Dainty
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Paper Abstract

It is well-known that calculations of the propagation of partially coherent light, such as those required for the calculation of two-dimensional image intensities, involve four-dimensional functions. Recently, Wald et al [Proc SPIE, 59621G, 2005] outlined a method for reducing the four-dimensional problem to a purely twodimensional one. Instead of an exact modal expansion of the mutual coherence function or cross-spectral density, an approximate expansion is used, into what we call elementary functions. In this paper, rules of thumb are developed for fast and efficient computation of the image intensity in a simple partially coherent lithographic imaging system.

Paper Details

Date Published: 16 March 2009
PDF: 5 pages
Proc. SPIE 7274, Optical Microlithography XXII, 727434 (16 March 2009); doi: 10.1117/12.814072
Show Author Affiliations
Arlene Smith, National Univ. of Ireland, Galway (Ireland)
Anna Burvall, National Univ. of Ireland, Galway (Ireland)
Christopher Dainty, National Univ. of Ireland, Galway (Ireland)

Published in SPIE Proceedings Vol. 7274:
Optical Microlithography XXII
Harry J. Levinson; Mircea V. Dusa, Editor(s)

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