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Proceedings Paper

Measurement of micro-hole with high aspect ratio by double optical fibers coupling
Author(s): Jiwen Cui; Jiubin Tan; Fei Wang; Chuanxi Song
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Paper Abstract

In order to measure the geometry of a micro-hole with high aspect ratio, we made the light coming out from the laser to transmit in the reversal direction by double optical fibers coupling, modeled both the energy distribution at the end of an optical fiber and the output of CCD, used zernike moment subpixel algorithm to locate the edge of an image and a compensation algorithm to improve the precision of edge location. The effectiveness of the method newly developed is verified through experiments. Experimental results indicate that the newly developed method can be used to measure the geometry of a blind hole of 2.0mm depth with a diameter of about 0.2mm using a double frequency interferometer with a repeatability uncertainty of less than 0.4m.

Paper Details

Date Published: 12 January 2009
PDF: 10 pages
Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 713325 (12 January 2009); doi: 10.1117/12.813972
Show Author Affiliations
Jiwen Cui, Harbin Institute of Technology (China)
Jiubin Tan, Harbin Institute of Technology (China)
Fei Wang, Harbin Institute of Technology (China)
Chuanxi Song, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 7133:
Fifth International Symposium on Instrumentation Science and Technology
Jiubin Tan; Xianfang Wen, Editor(s)

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