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Proceedings Paper

3D touch trigger probe based on fiber Bragg gratings
Author(s): Bangzhou Ding; Yetai Fei; Zheguang Fan
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Paper Abstract

This paper presents a 3D touch trigger probe based on Fiber Bragg Grating (FBG). The sensing principle is Bragg equation λ=2nΛ. Mutative strain and temperature outside alter both the refractive index (n) and grating pitches (Λ) of the fiber core, so the Bragg wavelength λ will change accordingly. The probe adopts FBG sensor system which has four FBGs provided with same parameter (three as sensor FBG and one as match FBG). Laser beam from broadband light source enter sensor FBGs through one coupler, the reflected light is imported to match FBG via another coupler, eventually captured by a high precision optoelectronic detector which monitors energy of the laser reflected by match FBG. The tip ball swings when it contact work pieces, and causes rotation of the plank by rigid connection, the displacement of the tip ball will be transferred to strain exerting on sensor FBGs. Consequently the strain results in Bragg wavelength shift of the reflected laser beam. The displacement of the probe leads to shift of Bragg wavelength of the sensor FBG, therefore, results in energy change of reflected light from the matching FBG. The probe based on FBG sensor brings an untouched branch of the application of Fiber grating sensors. It is also studied on key points of a touch trigger probe such as repeatability, trigger force and resolution.

Paper Details

Date Published: 23 March 2009
PDF: 11 pages
Proc. SPIE 7272, Metrology, Inspection, and Process Control for Microlithography XXIII, 72722U (23 March 2009); doi: 10.1117/12.813919
Show Author Affiliations
Bangzhou Ding, Hefei Univ. of Technology (China)
Yetai Fei, Hefei Univ. of Technology (China)
Zheguang Fan, Hefei Univ. of Technology (China)

Published in SPIE Proceedings Vol. 7272:
Metrology, Inspection, and Process Control for Microlithography XXIII
John A. Allgair; Christopher J. Raymond, Editor(s)

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