This paper aims to develop an effective multiscale simulation technique for the deformation analysis of nanotube-based nanoswitches. In the multiscale simulation, the key material parameters, (e.g., Young's modulus and moment of inertia) are extracted from the MD simulation which can explore the atomic properties. Then, the switches are simplified to continuum structure which is discretized and simulated by the advanced RBF meshfree formulation. The system of equations is nonlinear because the nonlinear loading is calculated from coupled the electrostatic, the elastostatic, and the van der Waals energy domains. Besides the normal deformation analysis, the pull-in voltage characteristics of different nanoswitches based on the double-walled nanotubes are analyzed. Comparing with the results in the literature and from experiments, it has proven that the developed multiscale approach is accurate and efficient.

Date Published: 30 December 2008
PDF: 9 pages
Proc. SPIE 7269, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV, 72690I (30 December 2008); doi: 10.1117/12.813893

Published in SPIE Proceedings Vol. 7269:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
Jung-Chih Chiao; Alex J. Hariz; David V. Thiel; Changyi Yang, Editor(s)