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Proceedings Paper

Selective removal of dielectric layers using picosecond UV pulses
Author(s): Viren V. Rana; Zhenhua Zhang
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Paper Abstract

To reduce the cost of energy obtained from photovoltaic cells, advanced cell design and processes are required for solar cell manufacturing. Many of these designs and processes are enabled by laser processing. As the availability of higher power and high beam quality pulsed solid state lasers increases, lasers are expected to find increased application in solar cell manufacturing. Solar cell processing will benefit further as production worthy lasers with picosecond pulse width become available. Picosecond lasers are well suited for selective removal of dielectrics for front and back metallization applications due to reduced thermal effect on the underlying substrate. We present results on silicon nitride and silicon oxide ablation that may find applications in advanced cell architecture.

Paper Details

Date Published: 5 March 2009
PDF: 8 pages
Proc. SPIE 7193, Solid State Lasers XVIII: Technology and Devices, 719321 (5 March 2009); doi: 10.1117/12.813872
Show Author Affiliations
Viren V. Rana, Applied Materials, Inc. (United States)
Zhenhua Zhang, Applied Materials, Inc. (United States)

Published in SPIE Proceedings Vol. 7193:
Solid State Lasers XVIII: Technology and Devices
W. Andrew Clarkson; Norman Hodgson; Ramesh K. Shori, Editor(s)

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