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Proceedings Paper

Vertical-cavity surface-emitting lasers for optical sensing in microfluidic microsystems
Author(s): Ansas M. Kasten; Joshua D. Tice; Antonios V. Giannopoulos; Varun B. Verma; Paul J. A. Kenis; Kent D. Choquette
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Paper Abstract

We describe the hybrid integration of vertical-cavity surface-emitting lasers with a network of microfluidic channels to form a compact microfluidic microsystem. VCSEL dies, created by standard fabrication techniques, are integrated on a silicon substrate which is merged with a micro-fluidic network of PDMS channels to form an opto-fluidic microsystem. The fabrication and integration process of VCSEL dies, silicon host substrate, and microfluidic network are discussed. Absorption measurements of the laser output power using IR absorbing dyes indicate a detection limit of 13 μM of dye concentration. A future integration scheme using monolithically integrated VCSEL / PIN photodetector dies is proposed.

Paper Details

Date Published: 6 February 2009
PDF: 7 pages
Proc. SPIE 7229, Vertical-Cavity Surface-Emitting Lasers XIII, 722909 (6 February 2009); doi: 10.1117/12.813407
Show Author Affiliations
Ansas M. Kasten, Univ. of Illinois (United States)
Joshua D. Tice, Univ. of Illinois (United States)
Antonios V. Giannopoulos, Univ. of Illinois (United States)
Varun B. Verma, Univ. of Illinois (United States)
Paul J. A. Kenis, Univ. of Illinois (United States)
Kent D. Choquette, Univ. of Illinois (United States)

Published in SPIE Proceedings Vol. 7229:
Vertical-Cavity Surface-Emitting Lasers XIII
Kent D. Choquette; Chun Lei, Editor(s)

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