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Proceedings Paper

Birefringence simulations of annealed ingot of calcium fluoride single crystal: consideration of creep behavior of ingot during annealing process
Author(s): Noriyuki Miyazaki; Hirotaka Ogino; Yuta Kitamura; Toshiro Mabuchi; Teruhiko Nawata
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Paper Abstract

We developed an analysis system for simulating birefringence of an annealed ingot of CaF2 single crystal caused by the residual stress after annealing process. The analysis system comprises the heat conduction analysis that provides the temperature distribution during the ingot annealing, the stress analysis to calculate the residual stress after ingot annealing, and the birefringence analysis of an annealed ingot induced by the residual stress. In the residual stress calculation, we can select either the elastic thermal stress analysis using the assumption of a stress-free temperature or more exact stress analysis considering the time-dependent nonlinear behavior of a material called creep. When we use the residual stress calculated from the creep deformation analysis of a CaF2 ingot, we can obtain reasonable results both for the optical path difference values and for its distributions in comparison with the experimental results.

Paper Details

Date Published: 16 March 2009
PDF: 12 pages
Proc. SPIE 7274, Optical Microlithography XXII, 72743H (16 March 2009); doi: 10.1117/12.812457
Show Author Affiliations
Noriyuki Miyazaki, Kyoto Univ. (Japan)
Hirotaka Ogino, Kyoto Univ. (Japan)
Yuta Kitamura, Kyoto Univ. (Japan)
Toshiro Mabuchi, Tokuyama Corp. (Japan)
Teruhiko Nawata, Tokuyama Corp. (Japan)

Published in SPIE Proceedings Vol. 7274:
Optical Microlithography XXII
Harry J. Levinson; Mircea V. Dusa, Editor(s)

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