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Proceedings Paper

Two-photon polymerization for fabrication of three-dimensional micro- and nanostructures over a large area
Author(s): M. Malinauskas; V. Purlys; M. Rutkauskas; R. Gadonas
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Paper Abstract

Two-photon polymerization has emerged as a technology for rapid fabrication of three-dimensional micro-structures with nanoscale resolution. Commonly, a Ti:Sapphire femtosecond laser (operating at 780-800 nm wavelength) working at MHz pulse repetition rate is applied as an irradiation source to photomodify the resin. We present a system for pinpoint two-photon polymerization which utilizes second harmonic (515 nm) of amplified Yb:KGW femtosecond laser working at 312.5 kHz pulse repetition rate. Shorter irradiation wavelength enables one to focus laser beam to a smaller spot. High repetition rate and high average power capacitates rapid fabrication of three-dimensional structures over a large area. Results obtained prove the highest resolution of fabrication to be up to ~100 nm, and reproducible resolution 200 nm. Some micro-structures fabricated rapidly over millimeter area and revealing the specific problems arising at high speed fabrication over large lateral dimensions are presented in this report. Results obtained show the system and technologies applied to be well suitable for future routine 3D structuring over the large area and application of such structures in photonics, micro-optics, micromechanics, microelectronics and cell growth for tissue engineering.

Paper Details

Date Published: 23 February 2009
PDF: 11 pages
Proc. SPIE 7204, Micromachining and Microfabrication Process Technology XIV, 72040C (23 February 2009); doi: 10.1117/12.811125
Show Author Affiliations
M. Malinauskas, Vilnius Univ. (Lithuania)
V. Purlys, Vilnius Univ. (Lithuania)
M. Rutkauskas, Vilnius Univ. (Lithuania)
R. Gadonas, Vilnius Univ. (Lithuania)

Published in SPIE Proceedings Vol. 7204:
Micromachining and Microfabrication Process Technology XIV
Mary-Ann Maher; Jung-Chih Chiao; Paul J. Resnick, Editor(s)

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