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Proceedings Paper

Thermal effects researching for laser microstructures synthesis by thermochemical circular laser writing
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Paper Abstract

Features of thermal trace forming by thermochemical circular laser writing in chromium films on glass (quartz) substrates are considered on the basis of thermal equation system solution. Linear (thermal parameters do not dependence on temperature) and nonlinear (thermal parameters dependence on temperature) models are considered. It is showed that linear model is enough for thermal trace broads consideration. Calculation of thermal field is provided for wide range of linear scanning velocities (from 1.2 up to 9.4 m/sec). Dynamics of chromium film heating when laser beam is switched on is researched. Difference of the thermal trace form in switching on area and switching off area is showed. Also structures like chess board are synthesized for experimental investigation. Influence of thermal processes inertness on the broadband image parameters is considered on such samples experimentally. Recommendations for experimental selection of writing power have been done.

Paper Details

Date Published: 12 January 2009
PDF: 9 pages
Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 713335 (12 January 2009); doi: 10.1117/12.811105
Show Author Affiliations
Vladislav G. Nikitin, Technological Design Institute of Scientific Instrument Engineering (Russian Federation)

Published in SPIE Proceedings Vol. 7133:
Fifth International Symposium on Instrumentation Science and Technology
Jiubin Tan; Xianfang Wen, Editor(s)

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