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Proceedings Paper

An acoustic phonon detection test setup for evaluating the frequency stability of clamped-clamped beam resonators
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Paper Abstract

Reliability testing of MEMS resonators has grown significantly in importance since these devices moved into high volume production. In line with this development, we present an automated phonon detection-based test setup, which utilizes a piezoelectric transducer to translate resonator mechanical motion into voltage, for investigating the long-term frequency stability of clamped-clamped beam resonators. The automated test system we have developed is able to continuously actuate up to four devices and characterize them every 30 minutes to monitor resonance frequency f0 and Q-factor changes resultant from long-term actuation. The surface temperature of the devices is also carefully monitored and the temperature data is used to compensate for the f0 variations caused by temperature fluctuations. The compensated f0 measurements obtained over time can be used to determine the frequency drift of the resonators. Q-factor degradation and variations in resonator in-plane displacement can also be detected by our system. The test system was used to monitor the behaviour of a 168.502 kHz resonator over a 225-hour operating period. The device was actuated in its linear mode at 29 ±1.0 °C and ~10-1 Pa. It showed an f0 shift of -1.092 Hz/day with Q-factor remaining at ~27,000 throughout. Resonator displacement was also consistent over the actuation period.

Paper Details

Date Published: 9 February 2009
PDF: 8 pages
Proc. SPIE 7206, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII, 72060D (9 February 2009); doi: 10.1117/12.809995
Show Author Affiliations
C.-L. Wong, National Univ. of Singapore (Singapore)
M. Palaniapan, National Univ. of Singapore (Singapore)

Published in SPIE Proceedings Vol. 7206:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII
Richard C. Kullberg; Rajeshuni Ramesham, Editor(s)

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