
Proceedings Paper
High accuracy measurements of long-term stability of material with PTB's Precision InterferometerFormat | Member Price | Non-Member Price |
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Paper Abstract
Demands on dimensional stability of 'high tech' materials relevant for semiconductor industry are growing
considerably. Information about long term stability of materials could be extracted from high resolution length
measurements performed within a relatively short time, e.g. using high finesse Fabry-Perot-resonators. However, the
length changes observed during the short-term measurements can be overlapped by additional length relaxations induced
by even small temperature changes before such measurement is started. This effect is reduced when long-term stability is
studied from length measurements repeated in a larger period of time. This paper describes absolute length
measurements with PTB's Precision Interferometer performed at four gauge block shaped material samples in order to
extract reliable information about their long term stability. The long-term stability was found to be dependent not only on
the material and its age itself but also on the material's history. The latter effect regards a one hour heating to 220°C
applied to one of two identical sample bodies made of glass-ceramics which is still visible in the measurement results of
long-term stability even after a period of almost seven years.
Paper Details
Date Published: 12 January 2009
PDF: 9 pages
Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 71333J (12 January 2009); doi: 10.1117/12.809987
Published in SPIE Proceedings Vol. 7133:
Fifth International Symposium on Instrumentation Science and Technology
Jiubin Tan; Xianfang Wen, Editor(s)
PDF: 9 pages
Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 71333J (12 January 2009); doi: 10.1117/12.809987
Show Author Affiliations
R. Schödel, Physikalisch-Technische Bundesanstalt (Germany)
A. Abou-Zeid, Physikalisch-Technische Bundesanstalt (Germany)
Published in SPIE Proceedings Vol. 7133:
Fifth International Symposium on Instrumentation Science and Technology
Jiubin Tan; Xianfang Wen, Editor(s)
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