Share Email Print
cover

Proceedings Paper

Diffraction gratings for compact integrated optical structures
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Diffraction gratings used in various applications for compact optical devices. We used different technologies for this task: deep-UV lithography, FIB milling, e-beam lithography, and hot embossing/nanoimprinting technology. We analyzed advantages and disadvantages of each fabrication technology.

Paper Details

Date Published: 24 February 2009
PDF: 9 pages
Proc. SPIE 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II, 72050O (24 February 2009); doi: 10.1117/12.809029
Show Author Affiliations
Ildar Salakhutdinov, Wayne State Univ. (United States)
Gregory W. Auner, Wayne State Univ. (United States)


Published in SPIE Proceedings Vol. 7205:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II
Thomas J. Suleski; Winston V. Schoenfeld; Jian Jim Wang, Editor(s)

© SPIE. Terms of Use
Back to Top
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray